TY  - BOOK
AU  - Namba Susumu Ed.
ED  - International Conference on Ion Implantation in Semiconductors and Other Materials (4th : 1974 : Osaka)
ED  - 
TI  - Ion implantation in semiconductors: science and technology -proceedings
U1  - 621.38152 
PY  - 1975///
CY  - New York
PB  - Plenum Press
KW  - Electronic circuits
KW  - Semiconductors
ER  -