TY  - BOOK
AU  - Chernow Fred Ed.
ED  - International Conference on Ion Implantation in Semiconductors and Other Materials (5th : 1976 : Colorado, Boulder)
ED  - 
TI  - Ion implantation in semiconductors
U1  - 621.38152 
PY  - 1977///
CY  - New York
PB  - Plenum
KW  - Electronic circuits
ER  -