TY  - BOOK
AU  - Konuma Mitsuharu
TI  - Plasma techniques for film deposition
SN  - 1-84265-151-X
U1  - 621.38152 
PY  - 2005///
CY  - Harrow
PB  - Alpha Science International
KW  - Plasma techniques
KW  - Thin-film technology
ER  -