| 000 | 00502nam a2200193Ia 4500 | ||
|---|---|---|---|
| 008 | 131223s9999 xx 000 0 und d | ||
| 040 | _aISI KOLKATA | ||
| 041 | _aEnglish | ||
| 082 |
_a621.38174 _bT473 |
||
| 245 | _aIntroduction to microlithography | ||
| 250 | _a2nd | ||
| 260 |
_aWashington _bAmerican Chemical Society _c19941994 |
||
| 300 | _axiv,527p. | ||
| 650 | _aMicrolithography | ||
| 700 |
_aBowden M J _4ed. |
||
| 700 |
_aThompson L F _4ed. |
||
| 700 |
_aWillson C G _4ed. |
||
| 942 | _cBK | ||
| 999 |
_c10885 _d10885 |
||