| 000 | 00526nam a2200193Ia 4500 | ||
|---|---|---|---|
| 008 | 131223s9999 xx 000 0 und d | ||
| 040 | _aISI KOLKATA | ||
| 041 | _aEnglish | ||
| 082 |
_a681.25375 _bD889 |
||
| 245 | _aMicroelectronics fabrication equipment | ||
| 260 |
_aLondon _bPergamon Press |
||
| 300 | _axii,531p. | ||
| 650 | _aFabrication equipment | ||
| 650 | _aMicroelectronics equipment | ||
| 650 | _aMicroelectronics instruments | ||
| 700 |
_aDummer G W A _4ed. |
||
| 700 |
_aRobertson J M _4ed. |
||
| 942 | _cBK | ||
| 999 |
_c58909 _d58909 |
||