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borderland which separates the known from the unknown”

-P.C.Mahalanobis


VLSI fabrication principles: (Record no. 436760)

MARC details
000 -LEADER
fixed length control field 01506nam a2200241Ia 4500
003 - CONTROL NUMBER IDENTIFIER
control field ISI Library, Kolkata
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20250220120342.0
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 250220b |||||||| |||| 00| 0 eng d
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9788126517909
040 ## - CATALOGING SOURCE
Original cataloging agency ISI Library
Language of cataloging English
041 ## - LANGUAGE CODE
Language code of text/sound track or separate title English
082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.38173
Item number G411
100 10 - MAIN ENTRY--PERSONAL NAME
Personal name Ghandhi, Sorab K.
245 10 - TITLE STATEMENT
Title VLSI fabrication principles:
Remainder of title Silicon and Gallium Arsenide/
Statement of responsibility, etc Sorab K. Ghandhi
250 ## - EDITION STATEMENT
Edition statement 2nd ed.
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication, distribution, etc New Delhi:
Name of publisher, distributor, etc John Wiley & Sons,
Date of publication, distribution, etc 1994
300 ## - PHYSICAL DESCRIPTION
Extent xxiv, 834 pages:
Other physical details diagrams;
Dimensions 23 cm.
504 ## - BIBLIOGRAPHY, ETC. NOTE
Bibliography, etc Includes bibliography and index
505 0# - FORMATTED CONTENTS NOTE
Formatted contents note Material Properties -- Phase Diagrams and Solid Solubility -- Crystal Growth and Doping -- Diffusion -- Epitaxy -- Ion Implantation -- Native Films -- Deposited Films -- Etching and Cleaning -- Lithographic Processes -- Device and Circuit Fabrication -- The Mathematics of Diffusion
520 ## - SUMMARY, ETC.
Summary, etc Fully updated with the latest technologies, this edition covers the fundamental principles underlying fabrication processes for semiconductor devices along with integrated circuits made from silicon and gallium arsenide. Stresses fabrication criteria for such circuits as CMOS, bipolar, MOS, FET, etc. These diverse technologies are introduced separately and then consolidated into complete circuits. An Instructor's Manual presenting detailed solutions to all the problems in the book is available from the Wiley editorial department.
650 0# - SUBJECT ADDED ENTRY--TOPICAL TERM
Source of heading or term Semiconductors
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type Books
Source of classification or shelving scheme Dewey Decimal Classification
Holdings
Lost status Not for loan Home library Current library Date acquired Full call number Accession Number Koha item type
    ISI Library, Kolkata ISI Library, Kolkata 10/02/2025 621.38173 G411 C27728 Books
Library, Documentation and Information Science Division, Indian Statistical Institute, 203 B T Road, Kolkata 700108, INDIA
Phone no. 91-33-2575 2100, Fax no. 91-33-2578 1412, ksatpathy@isical.ac.in